Alignment verification for electron beam lithography

Alignment between lithography layers is essential for device fabrication. A minor defect in a single marker can lead to incorrect alignment and this can be the source of wafer reworks. In this paper we show that this can be prevented by using extra alignment markers to check the alignment during patterning, rather than inspecting vernier patterns after the exposure is completed. Accurate vernier patterns can often only be read after pattern transfer has been carried out. We also show that by using a Penrose tile as a marker it is possible to locate the marker to about 1 nm without fully exposing the resist. This means that the marker can be reused with full accuracy, thus improving the layer to layer alignment accuracy. Lithography tool noise limits the process

Transport strategy in Scotland since devolution

This article critically reviews how the Scottish Executive's approach to transport has developed since devolution. Although there is much to commend, a number of concerns can be identified, including the possibility that a number of strategic infrastructure schemes appear to have been approved on political rather than on technical grounds. It is difficult to know whether the current set of transport infrastructure investment plans represents good value for public money

An Ontology Based Approach Towards A Universal Description Framework for Home Networks

Current home networks typically involve two or more machines sharing network resources. The vision for the home network has grown from a simple computer network, to every day appliances embedded with network capabilities. In this environment devices and services within the home can interoperate, regardless of protocol or platform. Network clients can discover required resources by performing network discovery over component descriptions. Common approaches to this discovery process involve simple matching of keywords or attribute/value pairings. Interest emerging from the Semantic Web community has led to ontology languages being applied to network domains, providing a logical and semantically rich approach to both describing and discovering network components. In much of the existing work within this domain, developers have focused on defining new description frameworks in isolation from existing protocol frameworks and vocabularies. This work proposes an ontology-based description framework which takes the ontology approach to the next step, where existing description frameworks are in- corporated into the ontology-based framework, allowing discovery mechanisms to cover multiple existing domains. In this manner, existing protocols and networking approaches can participate in semantically-rich discovery processes. This framework also includes a system architecture developed for the purpose of reconciling existing home network solutions with the ontology-based discovery process. This work also describes an implementation of the approach and is deployed within a home-network environment. This implementation involves existing home networking frameworks, protocols and components, allowing the claims of this work to be examined and evaluated from a ‘real-world’ perspective

Intuitionistic layered graph logic

Models of complex systems are widely used in the physical and social sciences, and the concept of layering, typically building upon graph-theoretic structure, is a common feature. We describe an intuitionistic substructural logic that gives an account of layering. As in bunched systems, the logic includes the usual intuitionistic connectives, together with a non-commutative, non-associative conjunction (used to capture layering) and its associated implications. We give soundness and completeness theorems for labelled tableaux and Hilbert-type systems with respect to a Kripke semantics on graphs. To demonstrate the utility of the logic, we show how to represent a range of systems and security examples, illuminating the relationship between services/policies and the infrastructures/architectures to which they are applied

A Stone-type Duality Theorem for Separation Logic Via its Underlying Bunched Logics

Stone-type duality theorems, which relate algebraic and relational/topological models, are important tools in logic because — in addition to elegant abstraction — they strengthen soundness and completeness to a categorical equivalence, yielding a framework through which both algebraic and topological methods can be brought to bear on a logic. We give a systematic treatment of Stone-type duality theorems for the structures that interpret bunched logics, starting with the weakest systems, recovering the familiar Boolean BI, and concluding with Separation Logic. Our results encompass all the known existing algebraic approaches to Separation Logic and prove them sound with respect to the standard store-heap semantics. We additionally recover soundness and completeness theorems of the specific truth-functional models of these logics as presented in the literature. This approach synthesises a variety of techniques from modal, substructural and categorical logic and contextualises the ‘resource semantics’ interpretation underpinning Separation Logic amongst them. As a consequence, theory from those fields — as well as algebraic and topological methods — can be applied to both Separation Logic and the systems of bunched logics it is built upon. Conversely, the notion of indexed resource frame (generalizing the standard model of Separation Logic) and its associated completeness proof can easily be adapted to other non-classical predicate logics

Discovering Homecare Services

Future homecare networks will consist of a very wide range of embedded services and software that will often rely on numerous other components to achieve their tasks. They will rarely operate in a self sufficient manner. The ability to discover and use services is not however a trivial task. Services may provide raw data, such as temperature readings, or higher contextual data, such as user activity and availability. Networks may change over time and may not be subject to a single management regime, implying the need for a great deal of self-reliance for any software component seeking services from elsewhere within the network. This chapter describes work carried out at the University of Stirling to improve service discovery and allow it to operate effectively in networks with a significant turnover in services. Simple syntactical keyword lookups are insufficient, and so semantics are introduced into the discovery process by using ontologies. However ontologies are known to grow and change over time and so maintaining them can be difficult and error-prone. The described approach employs a hierarchical approach that fosters re-use and sharing of ontologies to alleviate some of the more acute problems of building and maintaining large ontologies

Addressing prescription discrepancies in renal patients: a prospective audit

Background Management of chronic renal failure requires complex medication regimens to manage hypertension, hyperlipidaemia, diabetes, phosphate, anaemia and acidosis. Patient engagement in medicine management is essential to avoid potential harm. Methods We prospectively audited the rate of discrepancies between our hospital record of patient medications and their current prescription. We investigated whether changes to appointment letters reduced the number of discrepancies. Results The proportion of patients attending renal outpatient clinics failing to bring a list or unable to recall their medications fell over a 3-year period following changes to appointment letters (median proportion: 0.45 in 2014, 0.36 in 2015, 0.30 in 2016, Chi-sq = 46.94, p < 0.001); percentage of patients forgetting to bring a list with significant prescription discrepancies fell from 10.9% in 2014 to 3.9% in 2016). Conclusion Changes to appointment letters can potentially improve prescribing safety in an outpatient setting

The temporary anatomical structures prominent in the first trimester may be fulfilling exchange functions assigned to the placenta in the second and third trimester

The extra-embryonic coelom (EEC) and secondary yolk sac are prominent structures in the gestational sac during the first trimester of human pregnancy, at a time before the definitive placental circulation becomes established. We propose that the EEC and yolk sac play a critical role in the nutrition of early pregnancy, fulfilling exchange functions which are assumed by the placenta at a later stage

Early use of mineralocorticoid receptor antagonists in ST-elevation myocardial infarction: is it ever too early?

No abstract available